| 6,42366 %  | The Vanguard Group, Inc. | 2 023 844 | -41 045 | 30. 6. 2022 | 
| 6,19433 %  | BlackRock Institutional Trust Company, N.A. | 1 951 592 | 74 771 | 30. 6. 2022 | 
| 6,15350 %  | Janus Henderson Investors | 1 938 728 | -40 454 | 30. 6. 2022 | 
| 5,53006 %  | Wellington Management Company, LLP | 1 742 306 | 131 465 | 30. 6. 2022 | 
| 3,52050 %  | Mellon Investments Corporation | 1 109 171 | -28 122 | 30. 6. 2022 | 
| 3,42407 %  | Summit Creek Advisors LLC | 1 078 790 | 127 929 | 30. 6. 2022 | 
| 3,22614 %  | Disciplined Growth Investors, Inc. | 1 016 432 | 3 438 | 30. 6. 2022 | 
| 3,01310 %  | Shapiro Capital Management LLC | 949 310 | 343 476 | 30. 6. 2022 | 
| 2,87748 %  | Manulife Investment Management (North America) Limited | 906 582 | 284 949 | 30. 6. 2022 | 
| 2,64488 %  | ArrowMark Colorado Holdings, LLC | 833 297 | -849 346 | 30. 6. 2022 | 
| 2,38127 %  | Fidelity Management & Research Company LLC | 750 244 | 399 | 30. 6. 2022 | 
| 2,31235 %  | Dimensional Fund Advisors, L.P. | 728 531 | 131 759 | 30. 6. 2022 | 
| 2,20019 %  | State Street Global Advisors (US) | 693 193 | 4 455 | 30. 6. 2022 | 
| 1,88550 %  | Driehaus Capital Management, LLC | 594 049 | -827 483 | 30. 6. 2022 | 
| 1,70695 %  | Geode Capital Management, L.L.C. | 537 792 | 20 475 | 30. 6. 2022 | 
| 1,44922 %  | Royce Investment Partners | 456 593 | -347 175 | 30. 6. 2022 | 
| 1,22236 %  | Loomis, Sayles & Company, L.P. | 385 118 | -2 177 | 30. 6. 2022 | 
| 1,19139 %  | Nuveen LLC | 375 361 | -74 084 | 30. 6. 2022 | 
| 1,18614 %  | S Squared Technology, LLC | 373 707 | 70 000 | 30. 6. 2022 | 
| 1,17850 %  | Lapides Asset Management, LLC | 371 300 | 189 400 | 30. 6. 2022 | 
| 1,10936 %  | D. E. Shaw & Co., L.P. | 349 515 | 179 818 | 30. 6. 2022 | 
| 1,06836 %  | Potrero Capital Research, LLC | 336 599 | -1 519 | 30. 6. 2022 | 
| 1,02000 %  | Two Sigma Investments, LP | 321 363 | -81 717 | 30. 6. 2022 | 
| 1,00830 %  | Columbia Threadneedle Investments (US) | 317 677 | 7 961 | 30. 6. 2022 | 
| 0,92133 %  | Charles Schwab Investment Management, Inc. | 290 274 | -2 152 | 30. 6. 2022 | 
| 0,90316 %  | Silvercrest Asset Management Group LLC | 284 550 | -12 982 | 30. 6. 2022 | 
| 0,89783 %  | Brinker Capital Inc. | 282 871 | -65 852 | 28. 2. 2021 | 
| 0,86389 %  | Assenagon Asset Management S.A. | 272 179 | 90 379 | 30. 6. 2022 | 
| 0,83663 %  | Federated Hermes MDTA LLC | 263 588 | 58 992 | 30. 6. 2022 | 
| 0,79585 %  | Northern Trust Investments, Inc. | 250 741 | -4 790 | 30. 6. 2022 | 
| 0,79350 %  | Herald Investment Management Limited | 250 000 | 100 000 | 30. 6. 2022 | 
| 0,76778 %  | Spitz (David John) | 241 898 | 31 250 | 29. 8. 2022 | 
| 0,66463 %  | Renaissance Technologies LLC | 209 400 | -105 200 | 30. 6. 2022 | 
| 0,63097 %  | Millennium Management LLC | 198 794 | -283 275 | 30. 6. 2022 | 
| 0,56245 %  | BNY Mellon Asset Management | 177 205 | 843 | 30. 6. 2022 | 
| 0,56233 %  | Russell Investments Trust Company | 177 168 | 78 743 | 30. 6. 2022 | 
| 0,55100 %  | Hillsdale Investment Management Inc. | 173 600 | 0 | 30. 6. 2022 | 
| 0,52764 %  | Marshall Wace LLP | 166 238 | 12 352 | 30. 6. 2022 | 
| 0,51768 %  | Private Advisor Group LLC | 163 100 | 42 950 | 30. 6. 2022 | 
| 0,51228 %  | Punch & Associates Investment Management, Inc. | 161 400 | 0 | 30. 6. 2022 | 
| 0,51103 %  | BlackRock Financial Management, Inc. | 161 006 | 46 296 | 30. 6. 2022 | 
| 0,50952 %  | AQR Capital Management, LLC | 160 531 | 44 819 | 30. 6. 2022 | 
| 0,49752 %  | Premier Asset Management Ltd | 156 750 | 0 | 30. 6. 2022 | 
| 0,48961 %  | Diamond Hill Capital Management Inc. | 154 258 | 154 258 | 30. 6. 2022 | 
| 0,47477 %  | Acadian Asset Management LLC | 149 581 | 51 226 | 30. 6. 2022 | 
| 0,46702 %  | Oberweis Asset Management, Inc. | 147 140 | -31 100 | 30. 6. 2022 | 
| 0,45159 %  | Aviva Investors Global Services Limited | 142 277 | 50 502 | 30. 6. 2022 | 
| 0,39791 %  | Parametric Portfolio Associates LLC | 125 367 | 16 437 | 30. 6. 2022 | 
| 0,37901 %  | PGIM Quantitative Solutions LLC | 119 410 | 700 | 30. 6. 2022 | 
| 0,33847 %  | Polen Capital Management, LLC | 106 640 | 0 | 31. 7. 2022 | 
| 0,31718 %  | Martingale Asset Management, L.P. | 99 931 | 6 835 | 30. 6. 2022 | 
| 0,31613 %  | AXA Rosenberg Investment Management LLC | 99 600 | -2 800 | 31. 12. 2021 | 
| 0,30969 %  | Buckley (Timothy J) | 97 570 | 6 640 | 14. 3. 2022 | 
| 0,30599 %  | Williams (Timothy Valoris) | 96 406 | 3 320 | 14. 3. 2022 | 
| 0,30123 %  | Isthmus Partners, LLC | 94 907 | 5 195 | 30. 6. 2022 | 
| 0,29433 %  | BlackRock Investment Management, LLC | 92 731 | 8 084 | 30. 6. 2022 | 
| 0,27576 %  | Allen Diana Semel | 86 882 | 27 088 | 14. 3. 2022 | 
| 0,25392 %  | Needham Investment Management L.L.C. | 80 000 | 25 650 | 30. 6. 2022 | 
| 0,24709 %  | Northern Trust Global Investments | 77 848 | 5 846 | 30. 6. 2022 | 
| 0,23624 %  | Cowan (Joseph L) | 74 431 | 6 640 | 14. 3. 2022 | 
| 0,21105 %  | Cornetta (Richard F) | 66 495 | -2 388 | 1. 6. 2022 | 
| 0,20781 %  | GlobeFlex Capital, L.P. | 65 472 | 0 | 30. 6. 2022 | 
| 0,20314 %  | Schweizerische Nationalbank | 64 000 | -7 100 | 30. 6. 2022 | 
| 0,20013 %  | State of Wisconsin Investment Board | 63 053 | 32 853 | 30. 6. 2022 | 
| 0,19408 %  | Citadel Advisors LLC | 61 148 | 61 148 | 30. 6. 2022 | 
| 0,19398 %  | Rhumbline Advisers Ltd. Partnership | 61 117 | 9 828 | 30. 6. 2022 | 
| 0,18827 %  | Trexquant Investment LP | 59 317 | 5 686 | 30. 6. 2022 | 
| 0,18591 %  | William Blair & Company, L.L.C. (Research) | 58 574 | -2 885 | 30. 6. 2022 | 
| 0,18145 %  | Newton Investment Management North America, LLC | 57 167 | 0 | 30. 6. 2022 | 
| 0,14759 %  | Virginia Retirement System | 46 500 | 300 | 31. 3. 2022 | 
| 0,14434 %  | First Trust Advisors L.P. | 45 475 | -1 032 | 30. 6. 2022 | 
| 0,14365 %  | Jupiter Asset Management Ltd. | 45 259 | -1 903 | 30. 6. 2022 | 
| 0,14272 %  | Wilmington Trust Investment Advisors, Inc. | 44 964 | 27 582 | 30. 6. 2022 | 
| 0,14071 %  | Cubist Systematic Strategies, LLC | 44 332 | -21 553 | 30. 6. 2022 | 
| 0,13708 %  | Dimensional Fund Advisors, Ltd. | 43 190 | 0 | 31. 7. 2022 | 
| 0,12886 %  | Jennison Associates LLC | 40 600 | 600 | 30. 6. 2022 | 
| 0,12696 %  | Sparkasse Oberösterreich Kapitalanlagegesellschaft mbH | 40 000 | 0 | 30. 9. 2021 | 
| 0,12647 %  | RBC Global Asset Management (U.S.) Inc. | 39 846 | -1 372 | 30. 4. 2021 | 
| 0,11934 %  | Algert Global LLC | 37 600 | 1 391 | 30. 6. 2022 | 
| 0,11919 %  | Segovia (Elizabeth) | 37 553 | -1 518 | 13. 8. 2022 | 
| 0,11478 %  | California State Teachers Retirement System | 36 163 | -1 834 | 30. 6. 2022 | 
| 0,11443 %  | Stifel Nicolaus Investment Advisors | 36 052 | 4 207 | 30. 6. 2022 | 
| 0,10760 %  | State Teachers Retirement System of Ohio | 33 900 | 1 900 | 30. 6. 2022 | 
| 0,10647 %  | Aperio Group, LLC | 33 544 | 23 835 | 30. 6. 2022 | 
| 0,10302 %  | Susquehanna Fundamental Investments, LLC | 32 458 | 17 880 | 31. 3. 2022 | 
| 0,10036 %  | Engineers Gate Manager, L.P. | 31 621 | -61 478 | 30. 6. 2022 | 
| 0,10012 %  | Goldman Sachs Asset Management, L.P. | 31 545 | -7 035 | 30. 6. 2022 | 
| 0,09907 %  | Eika Kapitalforvaltning AS | 31 214 | 0 | 30. 6. 2022 | 
| 0,09855 %  | Columbia Threadneedle Management Limited | 31 049 | 65 | 30. 6. 2022 | 
| 0,08933 %  | IndexIQ Advisors LLC | 28 144 | 3 635 | 30. 6. 2022 | 
| 0,08684 %  | Putnam Investment Management, L.L.C. | 27 360 | 2 579 | 30. 6. 2022 | 
| 0,08642 %  | Voya Investment Management LLC | 27 227 | -977 | 30. 6. 2022 | 
| 0,08508 %  | Los Angeles Capital Management And Equity Research, Inc. | 26 806 | -1 000 | 30. 6. 2022 | 
| 0,08508 %  | Ostrum Asset Management | 26 806 | -1 584 | 30. 6. 2022 | 
| 0,08191 %  | BofA Global Research (US) | 25 808 | -13 181 | 30. 6. 2022 | 
| 0,07812 %  | State Street Global Advisors Ireland Limited | 24 613 | -960 | 31. 7. 2022 | 
| 0,07766 %  | Morgan Stanley & Co. LLC | 24 469 | -36 693 | 30. 6. 2022 | 
| 0,07581 %  | Dynamic Technology Lab Pte. Ltd. | 23 886 | 13 262 | 30. 6. 2022 | 
| 0,07121 %  | Jacobs Levy Equity Management, Inc. | 22 437 | -12 105 | 30. 6. 2022 | 
| 0,07096 %  | UBS Asset Management (UK) Ltd. | 22 358 | 5 818 | 30. 6. 2022 |